In-line Coating System
The system is a multi-chamber system and designed to coat planar large area substrates. While the substrates are carried from chamber to chamber separated by large transfer valves the different process steps are carried out in dedicated chambers. The frame carrying the substrates can hold substrates up to a planar surface of close to 5 m² and up to 50 mm in the 3rd dimension.
Such substrates can be mirrors, razor blades and so on. The first system was designed to coat bipolar plates for fuel cells and electrolyzers (details see here).